Microspheres Function as Microlenses for Projection Photolithography

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Type: Research/Researchers
Information: MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 275

DOI: https://doi.org/10.1557/mrs2001.50 [Opens in a new window]

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Microspheres Function as Microlenses for Projection Photolithography

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