Lattice-Dynamics Properties May Explain Low Dielectric Constant of Thin Films

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Type: Research/Researchers
Information: MRS Bulletin , Volume 25 , Issue 6: Defects and Diffusion in Silicon Processing , June 2000 , pp. 8

DOI: https://doi.org/10.1557/mrs2000.88 [Opens in a new window]

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Lattice-Dynamics Properties May Explain Low Dielectric Constant of Thin Films

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Lattice-Dynamics Properties May Explain Low Dielectric Constant of Thin Films

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