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Information: MRS Bulletin , Volume 36 , Issue 11: Progress and future directions for atomic layer deposition and ALD-based chemistry , November 2011 , pp. 935 - 942

DOI: https://doi.org/10.1557/mrs.2011.297 [Opens in a new window]

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CAREER CENTRAL

Volume 36, Issue 11
DOI: https://doi.org/10.1557/mrs.2011.297

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