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Ultraviolet patterning of KTiOPO4 thin films through metallo-organics

Published online by Cambridge University Press:  26 July 2012

Ken-ichi Noda ,
Wataru Sakamoto ,
Toshinobu Yogo  and
Shin-ichi Hirano
Ken-ichi Noda
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Wataru Sakamoto
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Toshinobu Yogo
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Shin-ichi Hirano
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Patterned KTiOPO4 (KTP) films were successfully synthesized through metallo-organics using ultraviolet (uv) patterning. A homogeneous precursor solution was prepared by the reaction control of (nBuO)2P(O) (OH), Ti(OEt)4, and KOEt in ethanol. The solubility of the KTP precursor films in ethanol changed with uv irradiation because of the polymerization of KTP precursor. The patterned KTP precursor films crystallized to single-phase KTP after heat treatment at 600 °C for 2 h. The patterned films were found to be exactly stoichiometric KTP.

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Journal of Materials Research , Volume 14 , Issue 1 , January 1999 , pp. 222 - 227
Copyright
Copyright © Materials Research Society 1999

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