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Substrate temperature dependence of structure and resistivity of SrRuO3 thin films grown by pulsed laser deposition on (100) SrTiO3

Published online by Cambridge University Press:  31 January 2011

N. D. Zakharov ,
K. M. Satyalakshmi ,
G. Koren  and
D. Hesse
N. D. Zakharov
Affiliation:
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, D-06120 Halle, Germany
K. M. Satyalakshmi
Affiliation:
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, D-06120 Halle, Germany, and Department of Physics, Technion–Israel Institute of Technology, Haifa 32000, Israel
G. Koren
Affiliation:
Department of Physics, Technion–Israel Institute of Technology, Haifa 32000, Israel
D. Hesse
Affiliation:
Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, D-06120 Halle, Germany
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Abstract

The resistivity of SrRuO3 thin films on (001) SrTiO3 substrates grown at different temperatures by pulsed laser deposition is correlated to the microstructure. Films grown at 775 °C are of an orthorhombic structure, contain very few defects, and exhibit a low resistivity of 150 μΩ cm. Films grown at other temperatures contain a cubic phase and show higher resistivities. The defects present in the films, particularly twins and antiphase boundaries, are analyzed by high-resolution transmission electron microscopy, and their origin, as well as influence on film resistivity, is discussed.

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Type
Articles
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Journal of Materials Research , Volume 14 , Issue 11 , November 1999 , pp. 4385 - 4394
Copyright
Copyright © Materials Research Society 1999

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