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Oxygen Gettering Effect During the Reactive Evaporation of Manganese Oxide Films

Published online by Cambridge University Press:  31 January 2011

Masaaki Isai ,
Katsuma Yamaguchi ,
Haruhiko Iyoda ,
Hiroshi Fujiyasu  and
Yasumitsu Ito
Masaaki Isai*
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Katsuma Yamaguchi
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Haruhiko Iyoda
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Hiroshi Fujiyasu
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Yasumitsu Ito
Affiliation:
Miyakoda Electronics Technical Center, Suzuki Motor Corporation, Shinmiyakoda 1–1-2, Hamamatsu 431–2103, Shizuoka, Japan
*
a)e-mail: isai@eng.shizuoka.ac.jp
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Abstract

Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. Mn was evaporated from a molybdenum boat by resistive heating and deposited on a glass slide under oxygen atmosphere. These films were examined with x-ray photoelectron spectroscopy (XPS) and x-ray diffraction. The Mn oxide films with a wide valency of Mn were prepared in this study. A rapid change of the back pressure was found as the deposition of Mn was started. This implies that Mn atoms start to react with O2. This means that in situ detection of reactive evaporation process can be utilized.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 4 , April 1999 , pp. 1653 - 1657
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1.Koksbang, R., Barker, J., Shi, H., and Saidi, M. Y., Solid State Ionics 84, 1 (1996).CrossRefGoogle Scholar
2.Basu, S., U.S. Patent 4,423,125 (1983).Google Scholar
3.Ohzuku, T., Kitagawa, M., and Hirai, T., J. Electrochem. Soc. 137, 769 (1990).CrossRefGoogle Scholar
4.Richard, M. N., Fuller, E.W., and Dahn, J. R., Solid State Ionics 73, 81 (1994).CrossRefGoogle Scholar
5.Wakihara, M., Gouhua, Li, Ikuta, H., and Uchida, T., Proc. Int. Workshop Adv. Batt., Osaka (1995), p. 47.Google Scholar
6.Xia, Y. and Yoshio, M., J. Power Sources 57, 125 (1995).CrossRefGoogle Scholar
7.Xia, Y., Takeshige, H., Noguchi, H., and Yoshio, M., J. Power Sources 56, 61 (1995).CrossRefGoogle Scholar
8.Kurimoto, H., Suzuoka, K., Murakami, T., Xia, Y., Nakamura, H., and Yoshio, M., J. Electrochem. Soc. 142 (7), 2156 (1995).CrossRefGoogle Scholar
9.Xia, Y. and Yoshio, M., J. Electrochem. Soc. 143 (3), 825 (1996).CrossRefGoogle Scholar
10.Laffez, P., van Tendeloo, G., Seshadri, R., Hervieu, M., Martin, C., Maignan, A., and Raveau, B., J. Appl. Phys. 80 (10), 5850 (1996).CrossRefGoogle Scholar
11.Gao, Y., Richard, M.N., and Dahn, J. R., J. Appl. Phys. 80 (7), 4141 (1996).CrossRefGoogle Scholar
12.Bando, Y., Horii, S., and Takada, T., Jpn. J. Appl. Phys. 17 (6), 1037 (1978).CrossRefGoogle Scholar
13.Moriwaki, K., Enomoto, Y., Kubo, S., and Murakami, T., Jpn. J. Appl. Phys. 27 (11), L2075 (1988).CrossRefGoogle Scholar
14.Terashima, T., Iijima, K., Yamamoto, K., Bando, Y., and Mazaki, H., Jpn. J. Appl. Phys. 27 (1), L91 (1988).CrossRefGoogle Scholar
15.Kumagai, N., Tanifuji, S., and Tanno, K., J. Power Sources 35, 313 (1991).CrossRefGoogle Scholar
16.Niles, D.W., Herdt, G., and Jassim, M. A., J. Appl. Phys. 81 (4), 1978 (1997).CrossRefGoogle Scholar
17.Hunter, J. C., J. Solid State Chem. 39, 142 (1981).CrossRefGoogle Scholar
18.Thackeray, M.M., David, W. I.F, Bruce, P. G., and Goodenough, J. B., Mater. Res. Bull. 18, 461 (1983).CrossRefGoogle Scholar
19.Thackeray, M.M., Johnson, P. J., de Picciotto, L. A., Bruce, P. G., and Goodenough, J. B., Mater. Res. Bull. 19, 179 (1984).CrossRefGoogle Scholar
20.David, W.I. F., Thackeray, M.M., de Picciotto, L.A., and Goodenough, J. B., J. Solid State Chem. 67, 316 (1987).CrossRefGoogle Scholar
21.Murphy, D.W., Cava, R. J., Zahurak, S. M., and Santoro, A., Solid State Ionics 9&10, 413 (1983).CrossRefGoogle Scholar