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Microchannel Molding: A Soft Lithography-inspired Approach to Micrometer-scale Patterning

Published online by Cambridge University Press:  01 August 2005

Christopher R. Martin  and
Ilhan A. Aksay
Christopher R. Martin
Affiliation:
Department of Chemical Engineering, Princeton University Princeton, New Jersey 08544-5263
Ilhan A. Aksay*
Affiliation:
Department of Chemical Engineering, Princeton University Princeton, New Jersey 08544-5263
*
a) Address all correspondence to this author. e-mail: iaksay@Princeton.edu
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Abstract

A new patterning technique for the deposition of sol-gels and chemical solution precursors was developed to address some of the limitations of soft lithography approaches. When using micromolding in capillaries to pattern precursors that exhibit large amounts of shrinkage during drying, topographical distortions develop. In place of patterning the elastomeric mold, the network of capillary channels was patterned directly into the substrate surface and an elastomer membrane is used to complete the channels. When the wetting properties of the substrate surfaces were carefully controlled using self-assembled monolayers (SAMs), lead zirconate titanate thin films with nearly rectangular cross-sections were successfully patterned. This technique, called microchannel molding (μCM), also provided a method for aligning multiple layers such as bottom electrodes for device fabrication.

Keywords

PiezoelectricSol-gelThin film
Type
Articles
Information
Journal of Materials Research , Volume 20 , Issue 8 , August 2005 , pp. 1995 - 2003
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

1Xia, Y. and Whitesides, G.M.: Soft Lithography. Ann. Rev. Mater. Sci. 28, 153 (1998).CrossRefGoogle Scholar
2Zhao, X-M., Xia, Y. and Whitesides, G.M.: Fabrication of three-dimensional micro-structures: Microtransfer molding. Adv. Mater. 8, 837 (1996).CrossRefGoogle Scholar
3Kim, J.H., Lange, F.F. and Cheon, C-I.: Epitaxial growth of patterned SrBi2Ta2O9 lines by channel stamping. J. Mater. Res. 14, 1194 (1999).CrossRefGoogle Scholar
4Moran, P.M. and Lange, F.F.: Microscale lithography via channel stamping: Relationships between capillarity, channel filling, and debonding. Appl. Phys. Lett. 74, 1332 (1999).CrossRefGoogle Scholar
5Kim, E., Xia, Y. and Whitesides, G.M.: Polymer microstructures formed by molding in capillaries. Nature 376, 581 (1995).CrossRefGoogle Scholar
6Xia, Y., Kim, E. and Whitesides, G.M.: Micromolding of polymers in capillaries: Applications in microfabrication. Chem. Mater. 8, 1588 (1996).CrossRefGoogle Scholar
7Kim, E., Xia, Y. and Whitesides, G.M.: Micromolding in capillaries: Applications in materials science. J. Am. Chem. Soc. 118, 5722 (1996).CrossRefGoogle Scholar
8Trau, M., Yao, N., Kim, E., Xia, Y., Whitesides, G.M. and Aksay, I.A.: Microscopic patterning of orientated mesoscopic silica through guided growth. Nature 390, 674 (1997).CrossRefGoogle Scholar
9Yang, P., Deng, T., Zhao, D., Feng, P., Pine, D., Chmelka, B.F., Whitesides, G.M. and Stucky, G.D.: Hierarchically ordered oxides. Science 282, 2244 (1998).CrossRefGoogle ScholarPubMed
10Beh, W.S., Xia, Y. and Qin, D.: Formation of patterned microstructures of polycrystalline ceramics from precursor polymers using micromolding in capillaries. J. Mater. Res. 14, 3995 (1999).CrossRefGoogle Scholar
11Seraji, S., Wu, Y., Jewell-Larson, N.E., Forbess, M.J., Limmer, S.J., Chou, T.P. and Cao, G.: Patterned microstructure of sol-gel derived complex oxides using soft lithography. Adv. Mater. 12, 1421 (2000).3.0.CO;2-4>CrossRefGoogle Scholar
12Vartuli, J.S., Özenbaş, M., Chun, C-M., Trau, M. and Aksay, I.A.: Micropatterned lead zirconium titanate thin films. J. Mater. Res. 18, 1259 (2003).CrossRefGoogle Scholar
13Martin, C.R. and Aksay, I.A.: Topographical evolution of lead zirconate titanate (PZT) thin films patterned by micromolding in capillaries. J. Phys. Chem. B 107, 4261 (2003).CrossRefGoogle Scholar
14Heule, M. and Gauckler, L.J.: Gas sensors fabricated from ceramic suspensions by micromolding in capillaries. Adv. Mater. 13, 1790 (2001).3.0.CO;2-C>CrossRefGoogle Scholar
15Marzolin, C., Smith, S.P., Prentiss, M. and Whitesides, G.M.: Fabrication of glass microstructures by micro-molding of sol-gel precursors. Adv. Mater. 10, 571 (1998).3.0.CO;2-P>CrossRefGoogle Scholar
16Matsuda, A., Matsuno, Y., Tatsumisago, M. and Minami, T.: Fine patterning and characterization of gel firms derived from methyltriethoxysilane and tetraethoxysilane. J. Am. Ceram. Soc. 81, 2849 (1998).CrossRefGoogle Scholar
17Schueller, O.J.A., Whitesides, G.M., Rogers, J.A., Meier, M. and Dodabalapur, A.: Fabrication of photonic crystal lasers by nanomolding of sol-gel glasses. Appl. Opt. 38, 5799 (1999).CrossRefGoogle Scholar
18Bulthaup, C.A., Wilhelm, E.J., Hubert, B.N., Ridley, B.A. and Jacobson, J.M.: All-additive fabrication of inorganic logic elements by liquid embossing. Appl. Phys. Lett. 79, 1525 (2001).CrossRefGoogle Scholar
19Kumar, A. and Whitesides, G.M.: Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘ink’ followed by chemical etching. Appl. Phys. Lett. 63, 2002 (1993).CrossRefGoogle Scholar
20Kumar, A., Biebuyck, H.A. and Whitesides, G.M.: Patterning self-assembled monolayers—Applications in materials science. Langmuir 10, 1498 (1994).CrossRefGoogle Scholar
21Jeon, N.L., Clem, P.G., Nuzzo, R.G. and Payne, D.A.: Patterning of dielectric oxide thin-layers by microcontact printing of self-assembled monolayers. J. Mater. Res. 10, 2996 (1995).CrossRefGoogle Scholar
22Jeon, N.L., Clem, P.G., Payne, D.A. and Nuzzo, R.G.: A monolayerbased lift-off process for patterning chemical vapor deposition copper thin films. Langmuir 12, 5350 (1996).CrossRefGoogle Scholar
23Clem, P.G., Jeon, N-L., Nuzzo, R.G. and Payne, D.A.: Monolayer-mediated deposition of tantalum(V) oxide thin film structures from solution precursors. J. Am. Ceram. Soc. 80, 2821 (1997).CrossRefGoogle Scholar
24Jeon, N.L., Clem, P., Jung, D.Y., Lin, W., Girolami, G.S., Payne, D.A. and Nuzzo, R.G.: Additive fabrication of integrated ferroelectric thin-film capacitors using self-assembled organic thin-film templates. Adv. Mater. 9, 891 (1997).CrossRefGoogle Scholar
25Payne, D.A. and Clem, P.G.: Monolayer-mediated patterning of integrated electroceramics. J. Electroceram. 3, 163 (1999).CrossRefGoogle Scholar
26Hwang, Y.K., Woo, S.Y., Lee, J.H., Jung, D-Y. and Kwon, Y-U.: Micropatterned CdS thin films by selective solution deposition using microcontact printing techniques. Chem. Mater. 12, 2059 (2000).CrossRefGoogle Scholar
27Bartz, M., Terfort, A., Knoll, W. and Tremel, W.: Stamping of monomeric SAMs as a route to structured crystallization templates: Patterned titania films. Chem. Eur. J. 6, 4149 (2000).3.0.CO;2-P>CrossRefGoogle ScholarPubMed
28Shin, H., Jeon, J.U., Pak, Y.E., Im, H. and Kim, E.S.: Formation and characterization of crystalline iron oxide films on self-assembled organic monolayers and their in situ patterning. J. Mater. Res. 16, 564 (2001).CrossRefGoogle Scholar
29Martin, C.R. and Aksay, I.A.: Submicrometer-scale patterning of ceramic thin films. J. Electroceramics 12, 53 (2004).CrossRefGoogle Scholar
30Martin, C.R. and Aksay, I.A. Low-cost patterning of ceramic thin films, in Electroceramic-Based MEMS: Fabrication-Technology and Applications, edited by Setter, N. (Springer Science+Business Media, New York, 2005), p. 387.CrossRefGoogle Scholar
31Folch, A. and Schmidt, M.A.: Wafer-level in-registry microstamping. J. Microelectromech. Syst. 8, 85 (1999).CrossRefGoogle Scholar
32Yi, G., Wu, Z. and Sayer, M.: Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro-optic properties. J. Appl. Phys. 64, 2717 (1988).CrossRefGoogle Scholar
33Shin, H.J., Wang, Y.H., Sampathkumaran, U., DeGuire, M.R., Heuer, A.H. and Sukenik, C.N.: Pyrolysis of self-assembled organic monolayers on oxide substrates. J. Mater. Res. 14, 2116 (1999).CrossRefGoogle Scholar
34Ganpule, C.S., Stanishevsky, A., Su, Q., Aggarwal, S., Melngailis, J., Williams, E. and Ramesh, R.: Scaling of ferroelectric properties in thin films. Appl. Phys. Lett. 75, 409 (1999).CrossRefGoogle Scholar
35Huang, Z., Zhang, Q. and Whatmore, R.W.: Low temperature crystallization of lead zirconate titanate thin films by a sol-gel method. J. Appl. Phys. 85, 7355 (1999).CrossRefGoogle Scholar
36Huang, Z., Zhang, Q. and Whatmore, R.W.: Structural development in the early stages of annealing of sol-gel prepared lead zirconate titanate thin films. J. Appl. Phys. 86, 1662 (1999).CrossRefGoogle Scholar