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Measuring the volume charge in dielectric films using single frequency electro-acoustic waves

Published online by Cambridge University Press:  03 March 2014

Dongfei Pei ,
Yuri M. Shkel ,
Daniel J. Klingenberg ,
Zakai I. Segal ,
Yoshio Nishi  and
J. Leon Shohet
Dongfei Pei
Affiliation:
Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
Yuri M. Shkel
Affiliation:
Commet LLC, Fitchburg, Wisconsin 53711
Daniel J. Klingenberg
Affiliation:
Department of Chemical and Biological Engineering and Rheology Research Center, University of Wisconsin, Madison, Wisconsin 53706
Zakai I. Segal
Affiliation:
Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
Yoshio Nishi
Affiliation:
Department of Electrical Engineering Stanford University, Stanford, California 94305
J. Leon Shohet*
Affiliation:
Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
*
a) Address all correspondence to this author. e-mail: shohet@engr.wisc.edu
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Abstract

An electro-acoustic method for measuring volume charge distributions in dielectric films (50 μm–0.2 mm thick) is described. A high voltage (>1 kV) sinusoidal signal (frequency ∼ 2 kHz) is applied across the dielectric sample. The charges inside the dielectric material will mechanically respond to the input electric signal and excite acoustic waves. The acoustic waves can be detected and measured using a piezoelectric sensor. By analyzing the received acoustic signal, we are able to compare the amount of charge in various samples.

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Type
Articles
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Journal of Materials Research , Volume 29 , Issue 4 , 28 February 2014 , pp. 501 - 508
Copyright
Copyright © Materials Research Society 2014 

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References

REFERENCES

Ren, H., Nishi, Y., and Shohet, J.L.: Changes to charge and defects in dielectrics from ion and photon fluences during plasma exposure. Electrochem. Solid State Lett. 14, H107 (2011).Google Scholar
Ahmed, H.N. and Srinivas, N.N.: Review of space charge measurements in dielectrics. IEEE Trans. Dielectr. Electr. Insul. 4, 644 (1997).Google Scholar
Collins, R.E.: Analysis of spatial distribution of charges and dipoles in electrets by a transient heating technique. J. Appl. Phys. 47, 4404 (1976).Google Scholar
Lang, S.B. and Das-Gupta, D.K.: Laser-intensity-modulation method: A technique for determination of spatial distributions of polarization and space charge in polymer electrets. J. Appl. Phys. 59, 2151 (1986).Google Scholar
Cheri, A., Abou Dakka, M., and Toureille, A.: The validation of the thermal step method. IEEE Trans. Electr. Insul. EI-27, 1152 (1992).Google Scholar
Alquie, C., Dreyfus, G., and Lewiner, J.: Stress wave probing of electric field distributions in dielectrics. Phys. Rev. Lett. 47, 1483 (1981).Google Scholar
Sessler, G.M., West, J.E., and Gerhard, G.: High-resolution laser-pulse method for measuring charge distributions in dielectrics. Phys. Rev. Lett. 48, 563–566 (1982).Google Scholar
Takada, T. and Sakai, T.: Measurement of electric fields at a dielectric/electrode interface using an acoustic transducer technique. IEEE Trans. Electr. Insul. 18, 619 (1983).Google Scholar
Li, Y., Yasuda, M., and Takada, T.: Pulsed electroacoustic method for measurement of charge accumulation in solid dielectrics. IEEE Trans. Dielectr. Electr. Insul. 1, 188 (1994).Google Scholar
Fukunaga, K.: Innovative PEA space charge measurement systems for industrial applications. IEEE Electr. Insul. Mag. 22, 18 (2004).CrossRefGoogle Scholar
Li, Y., M.Y., and Takada, T.: Pulsed electro-acoustic technique applied to in-situ measurement of charge distribution in electron-irradiated polymers. IEEE Trans. Dielectr. Electr. Insul. 10, 188 (2004).Google Scholar
Maeno, T. and Fukunaga, K.: High-resolution PEA charge distribution measurement system. IEEE Trans. Dielectr. Electr. Insul. 3, 754 (1996).Google Scholar
Bamji, S., Abou Dakka, M., and Bulinski, A.: Phase-resolved pulsed electro-acoustic technique to detect space charge in solid dielectrics subjected to AC voltage. IEEE Trans. Dielectr. Electr. Insul. 14, 77 (2007).CrossRefGoogle Scholar