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Inner surface reaction and modification of titanium alloy by a new plasma source ion implantation method

Published online by Cambridge University Press:  31 January 2011

Mu Sun ,
Kan Xie  and
Si-ze Yang
Mu Sun
Affiliation:
State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China
Kan Xie
Affiliation:
State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China
Si-ze Yang
Affiliation:
State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China
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Extract

The inner surface of a cylindrical titanium alloy target was successfully implanted with nitrogen ion using a new plasma source ion implantation method. By means of x-ray photoelectron spectroscopy and x-ray diffraction, the reactive phases and their chemical state in the implanted layer were investigated. In order to characterize the modification effect and its uniformity, the retained dose and the microhardness at seven different positions along the axis on the inner surface of the cylindrical target were measured, respectively. The experimental results show that a TiN reactive phase was formed in the implanted layer, which contributed to the improvement of inner surface microhardness. The root-mean-square deviations of retained dose and microhardness measured along the axis of the target are less than 9% and 4%, respectively, which are well within an acceptable tolerance range for metallic applications of ion implantation.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 7 , July 1998 , pp. 1823 - 1827
Copyright
Copyright © Materials Research Society 1998

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