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The extent of phase transformation in silicon hardness indentations

Published online by Cambridge University Press:  31 January 2011

Daniel L. Callahan  and
Jonathan C. Morris
Daniel L. Callahan
Affiliation:
Department of Mechanical Engineering and Materials Science, Rice University, Houston, Texas 77251-1892
Jonathan C. Morris
Affiliation:
Department of Mechanical Engineering and Materials Science, Rice University, Houston, Texas 77251-1892
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Abstract

The extent of phase transformation occurring in silicon during room-temperature indentation experiments has been examined by transmission electron microscopy of low-load microindents. The results show that the entire hardness impression arises from structural transformation and extrusion of a ductile high pressure phase. In particular, there is no dislocation activity or other mechanism of plastic deformation operating outside the clearly demarcated transformation zone. The observable impression consists of an amorphous transformation zone with an adjacent region of plastically extruded material and a layer of polycrystalline silicon at the near-surface transformation interface.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 7 , Issue 7 , July 1992 , pp. 1614 - 1617
Copyright
Copyright © Materials Research Society 1992

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