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Di- and tri-carboxylic-acid-based etches for processing high temperature superconducting thin films and related materials

Published online by Cambridge University Press:  03 March 2011

D.S. Ginley ,
L. Barr ,
C.I.H. Ashby ,
T.A. Plut ,
D. Urea ,
M.P. Siegal ,
J.S. Martens  and
M.E. Johansson
D.S. Ginley
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, Colorado 80401
L. Barr
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, Colorado 80401
C.I.H. Ashby
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
T.A. Plut
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
D. Urea
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
M.P. Siegal
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
J.S. Martens
Affiliation:
Conductus, Sunnyvale, California 94086
M.E. Johansson
Affiliation:
Conductus, Sunnyvale, California 94086
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Abstract

The development of passive and active electronics from high-temperature superconducting thin films depends on the development of process technology capable of producing appropriate feature sizes without degrading the key superconducting properties. We present a new class of chelating etches based on di- and tri-carboxylic acids that are compatible with positive photoresists and can produce submicron feature sizes while typically producing increases in the microwave surface resistance at 94 GHz by less than 10%. This simple etching process works well for both the Y-Ba-Cu-O and Tl-Ba-Ca-Cu-O systems. In addition, we demonstrate that the use of chelating etches with an activator such as HF allows the etching of related oxides such as LaAlO3, which is a key substrate material, and Pb(Zr0.53Ti0.47)O3 (PZT) which is a key ferroelectric material for HTS and other applications such as nonvolatile memories.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 5 , May 1994 , pp. 1126 - 1133
Copyright
Copyright © Materials Research Society 1994

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References

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