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Analysis of depth profiles of sol-gel derived multilayer coatings by Rutherford backscattering spectrometry and by cross-sectional transmission electron microscopy1

Published online by Cambridge University Press:  31 January 2011

Carol L. Schutte ,
Patrick M. Smith  and
George M. Whitesides
Carol L. Schutte
Affiliation:
Department of Chemistry, Harvard University, Cambridge, Massachusetts 02138 and Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Patrick M. Smith
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, Massachusetts 02138
George M. Whitesides*
Affiliation:
Department of Chemistry, Harvard University, Cambridge, Massachusetts 02138
*
a)Address correspondence to this author.
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Abstract

This paper describes the preparation and compositional analysis of multilayer thin-film coatings prepared using sol-gel techniques. Alternate layers were labeled with an iron tag, derived from hydrolyzed 1,1'-bis(triethoxysilyl)ferrocene. Iron-free layers were composed of SiO2 derived from hydrolyzed tetraethylorthosilicate (TEOS). Analyses of these systems were based on Rutherford Backscattering Spectrometry (RBS) and Cross-Sectional Transmission Electron Microscopy (XTEM). The depth profile of iron, measured by RBS, yielded thicknesses (1000–1600 Å) for the individual layers that could be verified independently by XTEM.

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Type
Articles
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Journal of Materials Research , Volume 6 , Issue 4 , April 1991 , pp. 835 - 839
Copyright
Copyright © Materials Research Society 1991

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References

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