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Structural and electrical properties of strontium barium niobate thin films crystallized by conventional furnace and rapid-thermal annealing process

Published online by Cambridge University Press:  31 January 2011

R. G. Mendes ,
E. B. Araújo  and
J. A. Eiras
R. G. Mendes
Affiliation:
Universidade Federal de Saõ Carlos, Departamento de Física, Grupo de Cerâmicas Ferroelétricas, Caixa Postal 676, 13565–670 Saõ Carlos, SP, Brazil
E. B. Araújo*
Affiliation:
Universidade Estadual Paulista, Departamento de Física e Química, Grupo de Vidros e Cerâmicas, Caixa Postal 31, 15385–000 Ilha Solteira, SP, Brazil
J. A. Eiras
Affiliation:
Universidade Federal de Saõ Carlos, Departamento de Física, Grupo de Cerâmicas Ferroelétricas, Caixa Postal 676, 13565–670 Saõ Carlos, SP, Brazil
*
a)Address all correspondence to this author.eudes@fqm.feis.unesp.br
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Abstract

Strontium barium niobate (SBN) thin films were crystallized by conventional electric furnace annealing and by rapid-thermal annealing (RTA) at different temperatures. The average grain size of films was 70 nm and thickness around 500 nm. Using x-ray diffraction, we identified the presence of polycrystalline SBN phase for films annealed from 500 to 700 °C in both cases. Phases such as SrNb2O6 and BaNb2O6 were predominantly crystallized in films annealed at 500 °C, disappearing at higher temperatures. Dielectric and ferroelectric parameters obtained from films crystallized by conventional furnace and RTA presented essentially the same values.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 10 , October 2001 , pp. 3009 - 3013
Copyright
Copyright © Materials Research Society 2001

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