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Numerical investigation of multiple-bubble behaviour and induced pressure in a megasonic field

Published online by Cambridge University Press:  06 April 2017

N. Ochiai Open the ORCID record for N. Ochiai [Opens in a new window]  and
J. Ishimoto
N. Ochiai*
Affiliation:
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
J. Ishimoto
Affiliation:
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
*
†Email address for correspondence: ochiai@alba.ifs.tohoku.ac.jp
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Abstract

Clarifying the mechanism of particle removal by megasonic cleaning and multiple-bubble dynamics in megasonic fields is essential for removing contaminant particles during nanodevice cleaning without pattern damage. In particular, the effect of the interaction of multiple bubbles on bubble-collapse behaviour and impulsive pressure induced by bubble collapse should also be discussed. In this study, a compressible locally homogeneous model of a gas–liquid two-phase medium is used to numerically analyse the multiple-bubble behaviour in a megasonic field. The numerical results indicate that, for bubbles with the same equilibrium radius, the natural frequency of the bubble decreases, and bubbles with smaller equilibrium radii resonate with the megasonic wave as the number of bubbles increases. Therefore, the equilibrium radius of bubbles showing maximum wall pressure decreases with an increasing number of bubbles. The increase in bubble number also results in chain collapse, inducing high wall pressure. The effect of the configuration of bubbles is discussed, and the bubble–bubble interaction in the concentric distribution makes a greater contribution to the decrease in the natural frequency of bubbles than the interaction in the straight distribution.

JFM classification

Drops and Bubbles: Bubble dynamics Drops and Bubbles: Cavitation Drops and Bubbles: Drops and Bubbles
Type
Papers
Information
Journal of Fluid Mechanics , Volume 818 , 10 May 2017 , pp. 562 - 594
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Copyright
© 2017 Cambridge University Press 

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Ochiai Supplementary Movie 1

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 2:0 μm, single bubble)

Download Ochiai Supplementary Movie 1(Video)
Video 2.5 MB

Ochiai Supplementary Movie 10

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 1:4 μm, seven bubbles, circular distribution)

Download Ochiai Supplementary Movie 10(Video)
Video 5 MB

Ochiai Supplementary Movie 11

Time evolution of pressure distribution and isoline of the void fraction α = 0:5 on the z plane (R0 = 1:6 μm, nine bubbles, circular distribution)

Download Ochiai Supplementary Movie 11(Video)
Video 643.4 KB

Ochiai Supplementary Movie 2

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 2:0 μm two bubbles)

Download Ochiai Supplementary Movie 2(Video)
Video 3 MB

Ochiai Supplementary Movie 3

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 2:0 μm, three bubbles)

Download Ochiai Supplementary Movie 3(Video)
Video 3.1 MB

Ochiai Supplementary Movie 4

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 1:6 μm, nine bubbles)

Download Ochiai Supplementary Movie 4(Video)
Video 5.4 MB

Ochiai Supplementary Movie 5

Time evolution of pressure distribution and isoline of the void fraction α = 0:5 on the z = 0 plane during the inner bubble collapse (R0 = 1:6 μm, nine bubbles)

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Video 806.5 KB

Ochiai Supplementary Movie 6

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R10 = 2:0 μm, R20 = 1:6 μm)

Download Ochiai Supplementary Movie 6(Video)
Video 3.3 MB

Ochiai Supplementary Movie 7

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 2:0 μm, two bubbles, long initial distance between bubbles)

Download Ochiai Supplementary Movie 7(Video)
Video 4.7 MB

Ochiai Supplementary Movie 8

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α = 0:5 (R0 = 1:8 μm, three bubbles, long initial distance between bubbles)

Download Ochiai Supplementary Movie 8(Video)
Video 5.7 MB

Ochiai Supplementary Movie 9

Time evolution of pressure distribution on the side wall and isosurface of the void fraction α 0:5 (R0 = 1:6 μm, five bubbles, circular distribution)

Download Ochiai Supplementary Movie 9(Video)
Video 4.1 MB