Hostname: page-component-cb9f654ff-p5m67 Total loading time: 0 Render date: 2025-08-25T02:13:59.022Z Has data issue: false hasContentIssue false
  • English
  • Français

Study of Thin Films and Multilayers using Energy-Dispersive Diffraction of Synchrotron Radiation

Published online by Cambridge University Press:  06 March 2019

R. J. Cernik ,
S. M. Clark  and
P. Pattison
R. J. Cernik
Affiliation:
Daresbury Laboratory Warrington WA44AD England
S. M. Clark
Affiliation:
Daresbury Laboratory Warrington WA44AD England
P. Pattison
Affiliation:
Daresbury Laboratory Warrington WA44AD England
Get access

Abstract

We present the results of a preliminary study of the use of polychromatic synchrotron radiation in energy-dispersive mode for the rapid characterization of thin film and multilayer materials. This technique takes advantage of the high intensity and excellent collimation properties of white beam synchrotron radiation. The glancing angle diffraction geometry allows structural depth probing as well as enhanced signal-to-noise by suppressing substrate contributions. The technique was successfully applied to metallic films a few hundred Angstroms thick, and to W-C multilayers.

Information

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 101 - 107
Copyright
Copyright © International Centre for Diffraction Data 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

Clark, S.M., 1989 “Energy-dispersive powder diffraction at the SRS”, Nucl. Instrum. Methods. A276:381.Google Scholar
Hart, M., and Parrish, W., 1986 “Parallel beam powder diffractometry using synchrotron radiation”, Materials Science Forum. 9:39.Google Scholar
Hart, M., and Parrish, W., 1989, “Polycrystalline diffraction and synchrotron radiation”, Mat. Res. Soc. Symp. Proc., 143:185.Google Scholar
Lim, G., Parrish, W., Ortiz, C., Bellouo, M., and Hart, M., 1987, “Grazing incidence synchrotron X-ray diffraction method for analysing thin films”, J. Mater. Res., 2:471.Google Scholar
Maira, W.C., Eisenberger, P., and Cho, A.Y., 1979, “X-ray total external reflection Bragg diffraction : A structural study of the GaAs-Al interface“ J. Appl. Phys., 50:6972.Google Scholar
Marra, W.C., Fuoss, P.H., and Eisenberger, P., 1982, “X-ray diffraction studies: Melting of Pb monolayers on Cu(110) surfaces”, Phys. Rev. Lett., 49:1169.Google Scholar
Parrish, W., Hart, M., Erickson, C.G., Masciocchi, N., and Huang, T.C., 1986, “Instrumentation for synchrotron X-ray powder diffractometry”, Advances in X-ray Analysis. 29:243.Google Scholar
Parrish, W., Hart, M., Huang, T.C., and Bellotto, M., 1987, “Lattice parameter determination using synchrotron powder data”, Advances in X-ray Analysis. 30:373.Google Scholar
York, B.R., and Austin, A.B., 1986, “Structural depth probing by glancing angle X-ray diffraction”, SPIE. 690:135.Google Scholar
Wagner, C.NJ., Boldrick, M.S., and Keller, L., 1988, “Micro structural characterization of thin polycrystalline films by X-ray diffraction”, Advances in X-ray Analysis, 31:129.Google Scholar