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Methyl halides as carbon sources in a hot-filament diamond CVD reactor: A new gas phase growth species

Published online by Cambridge University Press:  31 January 2011

Benjamin J. Bai ,
Judith C. Chu ,
Donald E. Patterson ,
Robert H. Hauge  and
John L. Margrave
Benjamin J. Bai
Affiliation:
Department of Chemistry, Rice University, Houston, Texas 77251-1892
Judith C. Chu
Affiliation:
Department of Chemistry, Rice University, Houston, Texas 77251-1892
Donald E. Patterson
Affiliation:
Department of Chemistry, Rice University, Houston, Texas 77251-1892
Robert H. Hauge
Affiliation:
Department of Chemistry, Rice University, Houston, Texas 77251-1892
John L. Margrave
Affiliation:
Department of Chemistry, Rice University, Houston, Texas 77251-1892
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Abstract

Equal amounts of carbon-12 methyl halides and carbon-13 methane, along with hydrogen, have been introduced into a hot-filament diamond CVD chamber. The isotopic ratios of the as-deposited diamond films on tantalum have been measured by Raman spectroscopy. It was found that methyl chloride yielded carbon-12 enriched diamond films, while the other methyl halides resulted in equal amounts of carbon-13 and carbon-12 in the films. Furthermore, the carbon-12 enrichment was more enhanced as the substrate temperature was lowered. Matrix-isolation FTIR analyses of the gas samples collected during the deposition indicated that there was no straightforward agreement between the 12C/13C ratios of the gas phase species, methane and acetylene, and that of the diamond films. The results imply the presence of a new chlorocarbon radical such as CH2Cl, which is postulated as a more effective growth species than the methyl radical.

Type
Communications
Information
Journal of Materials Research , Volume 8 , Issue 2 , February 1993 , pp. 233 - 236
Copyright
Copyright © Materials Research Society 1993

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References

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