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Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing

Published online by Cambridge University Press:  15 January 2014

Stephan Warnat ,
Hunter King ,
Rachael Schwartz ,
Marek Kujath  and
Ted Hubbard
Stephan Warnat
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Hunter King
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Rachael Schwartz
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Marek Kujath
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Ted Hubbard
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
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Abstract

The measurement of precise submicron displacements is essential in several MEMS applications. For instance, the measurement of the mechanical parameters of biological cells requires repeatable measurement of displacements in the nanometer regime. This paper presents a method to make displacement measurements in an aqueous MEMS environment with a ± 10 nm accuracy by using the blue channel of RGB pictures in combination with a FFT phase shift analysis.

Keywords

microelectro-mechanical (MEMS)actuatorbiomedical

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References

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