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Controlled Synthesis of Si Nanopillar Arrays for Photovoltaic and Plasmonic Applications

Published online by Cambridge University Press:  12 July 2012

Umesh Gautam ,
Jun Wang ,
Dilip Dachhepati ,
Seyyedsadegh Mottaghian ,
Khadijeh Bayat  and
Mahdi Farrokh Baroughi
Umesh Gautam
Affiliation:
Department of Electrical Engineering and Computer Science, South Dakota State University, Brookings, SD 57007
Jun Wang
Affiliation:
Department of Electrical Engineering and Computer Science, South Dakota State University, Brookings, SD 57007
Dilip Dachhepati
Affiliation:
Department of Electrical Engineering and Computer Science, South Dakota State University, Brookings, SD 57007
Seyyedsadegh Mottaghian
Affiliation:
Department of Electrical Engineering and Computer Science, South Dakota State University, Brookings, SD 57007
Khadijeh Bayat
Affiliation:
Harvard School of Engineering and Applied Sciences, 29 Oxford Street, Cambridge, MA 02138, USA
Mahdi Farrokh Baroughi
Affiliation:
Department of Electrical Engineering and Computer Science, South Dakota State University, Brookings, SD 57007
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Abstract

This paper focuses on developing a robust process to independently control the geometrical parameters of Si nano-pillar (NP) arrays. These parameters include height and diameter of NPs, spacing between them, and the shape of the NPs. We have shown that the diameter, height, and spacing of NPs can be independently engineered by controlling the diameter of nano-beads through synthesis procedure, duration of isotropic SiO2 etching and duration of anisotropic Si etching, respectively.

Keywords

nanostructurereactive ion etchingself-assembly

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Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1449: Symposium BB – Solution Synthesis of Inorganic Films and Nanostructured Materials , 2012 , mrss12-1449-bb03-39
Copyright
Copyright © Materials Research Society 2012

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References

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