Polymer-Silicon Microcantilevers Serve as Ultrasensitive IR Detectors

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Type: Research/Researchers
Information: MRS Bulletin , Volume 31 , Issue 6: Macroelectronics , June 2006 , pp. 438 - 439

DOI: https://doi.org/10.1557/mrs2006.111 [Opens in a new window]

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Polymer-Silicon Microcantilevers Serve as Ultrasensitive IR Detectors

Volume 31, Issue 6
Steven Trohalaki
DOI: https://doi.org/10.1557/mrs2006.111

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Polymer-Silicon Microcantilevers Serve as Ultrasensitive IR Detectors

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