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Secondary Electron Transmission Studies of the Electron Diffusion andThermalization Processes in Thin CVD Diamond Films

Published online by Cambridge University Press:  26 January 2016

Joan E. Yater*
Affiliation:
Naval Research Laboratory, Washington, DC 20375, U.S.A.
Kevin L. Jensen
Affiliation:
Naval Research Laboratory, Washington, DC 20375, U.S.A.
Tatyana I. Feygelson
Affiliation:
Naval Research Laboratory, Washington, DC 20375, U.S.A.
Bradford B. Pate
Affiliation:
Naval Research Laboratory, Washington, DC 20375, U.S.A.
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Abstract

Secondary electron transmission measurements are used to examine the electrondiffusion and thermalization processes in B-doped nanocrystalline diamondmembranes of thickness 2.3 μm and 650 nm. Specifically, transmittedenergy spectra are measured following impact by an electron beam that penetratesdeeper in the membrane as the beam energy Eo increases. Afully-thermalized emission peak is observed for Eo ≤ 16keV and Eo ≤ 7 keV from the 2.3-μm-thick and650-nm-thick films, respectively, with a small high-energy tail beginning toemerge at higher Eo. These measurements are analyzed using MonteCarlo simulations that generate constant-energy contour lines (down to 0.05Eo) as a function of beam depth into the film. From thesesimulations, we deduce that secondary electrons have a minimum thermalizationlength of ∼ 630 nm and ∼ 260 nm in the2.3-μm-thick and 650-nm-thick films, respectively. Further insightinto the secondary-electron transport behavior is gained from the analysis, andthis understanding is applied to the design of a transmission electron-currentamplifier device.

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Copyright
Copyright © Materials Research Society 2016 

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References

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