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Gas Sensor Devices based on CuO- and ZnO- Nanowires directlysynthesized on silicon substrate

Published online by Cambridge University Press:  07 April 2016

R. Wimmer-Teubenbacher ,
E. Lackner ,
J. Krainer ,
S. Steinhauer  and
A. Koeck
R. Wimmer-Teubenbacher*
Affiliation:
Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria
E. Lackner
Affiliation:
Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria
J. Krainer
Affiliation:
Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria
S. Steinhauer
Affiliation:
Okinawa Institute of Science and Technology (OIST) Graduate University, 1919-1 Onna-Son, Okinawa 904-0495, Japan
A. Koeck
Affiliation:
Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria
*
*(Email: robert.wimmer-teubenbacher@mcl.at)
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Abstract

In-situ grown CuO and ZnO nanowire (NW) arrays were evaluated for their gassensing performance. The metal structures were fabricated by standard e-beamlithography, thermal evaporation and lift-off process onto a silicon substratewith gold electrodes. After integration onto a test structure with resistiveheater and thermocouple for temperature control, the samples were thermallyoxidized at 400°C. During thermal oxidation, nanowires were grownbetween the oxidized metal structures. The gas sensing performance of the NWarray was tested for carbon monoxide, - and a hydrocarbon-mixture (acetylene,ethane, ethene, and propene) at three relative humidity levels.

Keywords

nanostructuresensoroxide

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Type
Articles
Information
MRS Advances , Volume 1 , Issue 13: Nanomaterials and Synthesis , 2016 , pp. 817 - 823
Copyright
Copyright © Materials Research Society 2016 

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References

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